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    Fluid Flow

    Instrumentation and control

    This is an ultraprecision flow measurement control system applied in various processes such as flow measurement equipment exclusive for high temperature chemical and supply of semiconductor liquid chemical use, discharge monitoring and control system, and used amount integration and management system.
    We are expanding technical skills in product manufacturing and system development in measurement control automation field based on advanced technology and we are representatively manufacturing ultraprecision flow measurement control system of semiconductor devices.

    • Liquid chemical use process (supply or discharge monitor and control)

    • Facility modification and improvement

    • New materials

    • Semiconductor (FPD) manufacturing device

    • Chemical Flow Sensor
      It can be used for the purpose of flow measurement or control by connecting to Flow Monitor(Indicating devices such as Flow Rate, Total, and Acc. Total) of Pulse Flow Input Type or Batch Controller (fixed quantity supply device), Dispense Controller (fixed quantity discharge controller) as it outputs a pulse signal in proportion to the flow velocity resulting from the wheel rotation when passing through the fluid. High Temperature Chemical Flow Sensor & Flow Monitor
    • Flow Controller & Flow Monitor
      We retain various products suitable to each facility by each process, large size and long-term data storage function setting is possible by using and selecting each monitoring mode and control mode from basic type to multi channel, multiple channel, and establishment and application of real-time central monitoring and remote control system are possible.