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    Leak Sensor

    Spill/leakage detection sensor & system establishment

    Leak Detecting System, as a leakage detecting system that consists of a leak sensor and a leak detector (controller), is a system that continuously monitors by installing it at the expected point of spill/leakage such as the pipe connection part and tank, near pumps, etc. and that prevents accidents in advance by outputting warning sound at the site and a relay alarm at the control system.

    SYSTEM CONFIGRATION

    Area Type
    It is as leak detection sensor with fluorine contained polymer material that is applied to the bottom side of the equipment such as semiconductor facilities and indoor storage devices, immediately detects even a single drop of liquid, and that can be continuously reused after neutralization cleaning.

    • Liquid chemical use process (supply or discharge monitor and control)

    • Facility modification and improvement

    • New materials

    • Semiconductor (FPD) manufacturing device

    Film Type
    It is classified into Jacket Type and Non-jacket Type, and the Jacket Type is water free mainly installed near external tanks and pumps and it does not react with foreign materials such as water and dust but detects only the subject chemical materials.
    Non-jacket Type is diversely used in indoor warehouse, semiconductor device parts, indoor leakage points, etc., it immediately detects conductive liquids, and it can be reused immediately after cleaning.
    Point Type
    As a sensor that can be diversely utilized in a narrow space, it detects liquid inflow by mainly installing it inside the sump located near the external tank.

    • Reusable sensors

    • Detect specific chemical (Jacket Type) and all conductive liquids (Non-jacket Type)

    • As a fluorine contained polymer, it is detected without deformation in 200 degrees sulfuric acid

    • Easy and convenient installation (it can be installed without a connection part)

    Applied cases

    • Harmful chemical substance storage tank
    • Harmful chemical substance storage tank
    • Sump and trench
    • Laboratory & chemical storage box
    • Inside the semiconductor device
    • In+B157side the warehouse storage facility
    • Laboratory & chemical storage box
    • Inside the semiconductor device
    • In+B157side the warehouse storage facility